Hard and electrically conductive multicomponent diboride-based films with high thermal stability
نویسندگان
چکیده
We report high-quality, hard (31–41 GPa), crack-resistant (hardness-to-effective Young's modulus ratio of 0.13–0.16) and electrically conductive (2.8–4.2 × 105 S m?1) HfB2-based ceramic materials with high thermal stability. The were prepared in the form well adhesive films using a simple deposition process: pulsed magnetron sputtering (B4C target overlapped by metal stripes) onto floating substrates. go through wide range compositions resulting from incorporating five other metals (Ti, Y, Zr, Ho or Ta) which partially replace Hf, focus on effect number characteristics elements sublattice. Regardless incorporated elements, no segregation to more than one AlB2-type crystalline phase was observed. Growing leads decreasing crystal size as indicated width diffraction peaks, strongly compressive stress less 2 GPa slightly hardness electrical conductivity. experimental data are explained Monte-Carlo calculations energy delivered into growing films. stability septenary diboride-based Hf8Zr4Ti4Ta4Y5B60C9 Hf10Zr4Ti4Ta4Ho5B58C9 superior that quaternary Hf22Y5B58C9 Hf22Ho5B58C9 when annealed 1300 °C. Both single solid solution (X-ray diffraction) dense pinhole-free structure (scanning electron microscopy) observed for not only before but also after annealing. results important design industry-friendly preparation thin-film combining multiple functional properties various technological applications.
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ژورنال
عنوان ژورنال: Ceramics International
سال: 2022
ISSN: ['0272-8842', '1873-3956']
DOI: https://doi.org/10.1016/j.ceramint.2021.09.131